Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)

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Main Author:	Muhammad Afif Abdul Rahman
Other Authors:	Shaiful Nizam Mohyar (Advisor)
Format:	Learning Object
Language:	English
Published:	Universiti Malaysia Perlis 2008
Subjects:	Electron beams Scanning electron microscopes Silicon Microelectronics Microelectronic fabrication
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/1984
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Institution:	Universiti Malaysia Perlis
Language:	English

id	my.unimap-1984
record_format	dspace
spelling	my.unimap-19842008-09-09T04:12:23Z Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID) Muhammad Afif Abdul Rahman Shaiful Nizam Mohyar (Advisor) Electron beams Scanning electron microscopes Silicon Microelectronics Microelectronic fabrication Access is limited to UniMAP community. Electron beam induced deposition (EBID) is a well established technique for highresolution direct material deposition from the gas phase onto a substrate. A finely focused electron beam of a scanning electron microscope or an electron beam writing system locally decomposes gas molecules which are adsorbed on the sample surface. The resulting volatile components are evacuated by the pumping system, while nonvolatile material is cross-linked in a kind of polymerization process, building up the deposit. In this project, the influence of acceleration voltage will be studied as a parameter. The influences of the length, diameter and shape of the deposited structures are also analyzed in this project. 2008-09-08T08:13:45Z 2008-09-08T08:13:45Z 2008-03 Learning Object http://hdl.handle.net/123456789/1984 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution	Universiti Malaysia Perlis
building	UniMAP Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Malaysia Perlis
content_source	UniMAP Library Digital Repository
url_provider	http://dspace.unimap.edu.my/
language	English
topic	Electron beams Scanning electron microscopes Silicon Microelectronics Microelectronic fabrication
spellingShingle	Electron beams Scanning electron microscopes Silicon Microelectronics Microelectronic fabrication Muhammad Afif Abdul Rahman Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
description	Access is limited to UniMAP community.
author2	Shaiful Nizam Mohyar (Advisor)
author_facet	Shaiful Nizam Mohyar (Advisor) Muhammad Afif Abdul Rahman
format	Learning Object
author	Muhammad Afif Abdul Rahman
author_sort	Muhammad Afif Abdul Rahman
title	Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_short	Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_full	Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_fullStr	Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_full_unstemmed	Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_sort	study of acceleratin voltage influence the conical structure during electron beam induced deposition (ebid)
publisher	Universiti Malaysia Perlis
publishDate	2008
url	http://dspace.unimap.edu.my/xmlui/handle/123456789/1984
_version_	1643787513984188416

Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)

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