Vertical electrostatic comb drive actuator for MEMS design
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| Language: | English |
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Universiti Malaysia Perlis
2008
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| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/2004 |
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my.unimap-20042008-09-09T05:02:05Z Vertical electrostatic comb drive actuator for MEMS design Wan Mokhdzani Wan Nor Haimi Hafiz Ismail (Advisor) Microelectromechanical systems -- Design and construction Microelectronics Actuators Comb-drive actuator Microsensor Detectors Access is limited to UniMAP community. This report serves as a summary for project titled Vertical Electrostatic Comb-Drive Actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuation force for a certain amount of displacement for the use of deflection. The comb-finger structure moves in a perpendicular direction to the substrate as a function of applied voltages. Actuation force changes for different physical parameters of the comb finger structure. 2008-09-09T05:02:05Z 2008-09-09T05:02:05Z 2008-04 Learning Object http://hdl.handle.net/123456789/2004 en Universiti Malaysia Perlis School of Microelectronic Engineering |
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Universiti Malaysia Perlis |
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UniMAP Library |
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Institutional Repository |
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Asia |
| country |
Malaysia |
| content_provider |
Universiti Malaysia Perlis |
| content_source |
UniMAP Library Digital Repository |
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http://dspace.unimap.edu.my/ |
| language |
English |
| topic |
Microelectromechanical systems -- Design and construction Microelectronics Actuators Comb-drive actuator Microsensor Detectors |
| spellingShingle |
Microelectromechanical systems -- Design and construction Microelectronics Actuators Comb-drive actuator Microsensor Detectors Wan Mokhdzani Wan Nor Haimi Vertical electrostatic comb drive actuator for MEMS design |
| description |
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| author2 |
Hafiz Ismail (Advisor) |
| author_facet |
Hafiz Ismail (Advisor) Wan Mokhdzani Wan Nor Haimi |
| format |
Learning Object |
| author |
Wan Mokhdzani Wan Nor Haimi |
| author_sort |
Wan Mokhdzani Wan Nor Haimi |
| title |
Vertical electrostatic comb drive actuator for MEMS design |
| title_short |
Vertical electrostatic comb drive actuator for MEMS design |
| title_full |
Vertical electrostatic comb drive actuator for MEMS design |
| title_fullStr |
Vertical electrostatic comb drive actuator for MEMS design |
| title_full_unstemmed |
Vertical electrostatic comb drive actuator for MEMS design |
| title_sort |
vertical electrostatic comb drive actuator for mems design |
| publisher |
Universiti Malaysia Perlis |
| publishDate |
2008 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/2004 |
| _version_ |
1643787528715632640 |