Study of the cycle time behavior for product scaling 0.16um and smaller in foundry

International Postgraduate Conference On Engineering (IPCE 2010), 16th - 17th October 2010 organized by Centre for Graduate Studies, Universiti Malaysia Perlis (UniMAP) at School of Mechatronic Engineering, Pauh Putra Campus, Perlis, Malaysia.

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Bibliographic Details
Main Authors: Mohd Azizi, Chik, Uda, Hashim, Prof. Dr.
Other Authors: Mohd_azizi@silterra.com
Format: Working Paper
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2012
Subjects:
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/21649
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Institution: Universiti Malaysia Perlis
Language: English
Description
Summary:International Postgraduate Conference On Engineering (IPCE 2010), 16th - 17th October 2010 organized by Centre for Graduate Studies, Universiti Malaysia Perlis (UniMAP) at School of Mechatronic Engineering, Pauh Putra Campus, Perlis, Malaysia.