Simulasi Fabrikasi Simpangan Cetek Ultra menggunakan Resapan Dopan daripada SOD (Spin On Dopant)

Simulasi Fabrikasi Simpangan Cetek Ultra menggunakan Resapan Dopan daripada SOD (Spin On Dopant)

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Bibliographic Details
Main Authors: Uda, Hashim, Nik Hazura, Nik Hamat, Fauziyah, Salehuddin, Ibrahim, Ahmad, Sutikno Madnasri
Format: Article
Language:other
Published: Universiti Malaysia Perlis 2008
Subjects:
Simpangan cetek ultra
T-SUPREM4
Spin On Dopant (SOD)
Resapan
ULSI
Semiconductors
Semiconductors > Materials
Integrated circuits > Design and construction
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/2178
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Institution: Universiti Malaysia Perlis
Language: other

Internet

http://dspace.unimap.edu.my/xmlui/handle/123456789/2178

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