Design and fabrication of quantum dot single electron transistors using scanning electron microscopy-based electron-beam nanolithogrphy

• Main Author: Sutikno
• Other Authors: Prof. Dr. Uda Hashim
• Format: Thesis
• Language: English
• Published: Universiti Malaysia Perlis 2012
• Subjects: Quantum dot single-electron transistor (QD SET); Transistor; Nano devices; ma-N 2403; PMMA 495 K
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/22189
• Institution: Universiti Malaysia Perlis

Quantum dot single-electron transistor (QD SET) is a nanoscale device operated at very low temperature. To fabricate QD SET operated at room temperature, QD must be fabricated in diameter of 10 nm. QD SET promises very small integrated circuits with ultralow-power consumption. In this research, a QD...