Fabrication of nanowire using ash trimming technique
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Trans Tech Publications
2013
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my.unimap-234722013-02-13T06:23:11Z Fabrication of nanowire using ash trimming technique Tijjani Adam, Shuwa Uda, Hashim, Prof. Dr. Leow, Pei Ling Qazi Mohammad, Humayun tijjaniadam@yahoo.com uda@unimap.edu.my leowpl@fke.edu.my qazihumayun2@gmail.com Ash trimming Fabrication Nanowire Photoresist Plasma oxidation Link to publisher's homepage at http://www.ttp.net/ The paper present a report on fabrication of Nanowire using plasma oxidation, we monitor changes by studying the morphology and Δw/Δh, the study also revealed that the proposed fabrication method could potentially be used to fabricate specific nanometer-scale structure and space structure with uniform surface morphology without any damage to the photoresist. Yet with reduced ashing time and without popping of the photoresist ashing process when the a fabricated is being carried out and subsequently trimmed to nano size by plasma oxidation, the study also revealed the dramatic increase in aspect ratio as the structure reduces in lateral dimension. 2013-02-13T06:23:11Z 2013-02-13T06:23:11Z 2013 Article Advanced Materials Research, vol.626, 2013, pages 1042-1047 1022-6680 http://www.scientific.net/AMR.626.1042 http://hdl.handle.net/123456789/23472 en Trans Tech Publications |
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English |
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Ash trimming Fabrication Nanowire Photoresist Plasma oxidation |
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Ash trimming Fabrication Nanowire Photoresist Plasma oxidation Tijjani Adam, Shuwa Uda, Hashim, Prof. Dr. Leow, Pei Ling Qazi Mohammad, Humayun Fabrication of nanowire using ash trimming technique |
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Link to publisher's homepage at http://www.ttp.net/ |
| author2 |
tijjaniadam@yahoo.com |
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tijjaniadam@yahoo.com Tijjani Adam, Shuwa Uda, Hashim, Prof. Dr. Leow, Pei Ling Qazi Mohammad, Humayun |
| format |
Article |
| author |
Tijjani Adam, Shuwa Uda, Hashim, Prof. Dr. Leow, Pei Ling Qazi Mohammad, Humayun |
| author_sort |
Tijjani Adam, Shuwa |
| title |
Fabrication of nanowire using ash trimming technique |
| title_short |
Fabrication of nanowire using ash trimming technique |
| title_full |
Fabrication of nanowire using ash trimming technique |
| title_fullStr |
Fabrication of nanowire using ash trimming technique |
| title_full_unstemmed |
Fabrication of nanowire using ash trimming technique |
| title_sort |
fabrication of nanowire using ash trimming technique |
| publisher |
Trans Tech Publications |
| publishDate |
2013 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/23472 |
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1643794004809089024 |