Surface roughness and wettability investigation of varied plasma parameter effect on PVD deposited aluminium

• Main Author: Moganraj, Palianysamy
• Format: Thesis
• Language: English
• Published: Universiti Malaysia Perlis (UniMAP) 2014
• Subjects: Microelectronic engineering; Surface roughness; Surface metrology; Aluminium deposition; Surface Wettability; Physical Vapor Deposition (PVD)
• Online Access: http://dspace.unimap.edu.my:80/dspace/handle/123456789/31159
• Institution: Universiti Malaysia Perlis

Surface metrology has been a focused and thoroughly investigated research niche since the advent of device fabrication. The current technology shift into MEMS and nano has again made surface metrology a focused area. Layer adhesion and bonding have surface metrology importance here. In this work, su...