Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization

This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, the SiNWs sensor is designed via Elphy Quantum GDS II Editor and AutoCAD. A to...

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書目詳細資料
主要作者: Siti Fatimah, Abd Rahman
格式: Thesis
語言:English
出版: Universiti Malaysia Perlis (UniMAP) 2014
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在線閱讀:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33136
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機構: Universiti Malaysia Perlis
語言: English