Mask design and fabrication of Micro/Nanowire biochip for reliable and repeatability pattern transfer

Mask design and fabrication of Micro/Nanowire biochip for reliable and repeatability pattern transfer

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Bibliographic Details
Main Authors: Veeradasan, Perumal, Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa
Other Authors: veerdasaan@hotmail.my
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
Biochip
Critical dimension
Mask aligner
Microwire
Pattern transfer
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33542
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my:80/dspace/handle/123456789/33542

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