Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method

• Main Authors: Mohammad Nuzaihan, Md Nor, Uda, Hashim, Prof. Dr., Nazwa, Taib, Tijjani Adam, Shuwa
• 其他作者: [e-mail]
• 格式: Article
• 語言: English
• 出版: Trans Tech Publications 2014
• 主題: Advance nanolithography; Atomic force microscopy (AFM); BOE; EBL; Inductively coupled plasma-reactive ion etching; ma-N2400 negative resist; Silicon nanowire; Size-reduction; Thermal oxidation
• 在線閱讀: http://dspace.unimap.edu.my:80/dspace/handle/123456789/33553
• 機構: Universiti Malaysia Perlis

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