Design and simulation of film bulk acoustic wave resonator in kuband
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Trans Tech Publications
2014
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my.unimap-348372014-05-28T08:52:31Z Design and simulation of film bulk acoustic wave resonator in kuband Nurul Izza, Mohd Nor, Dr. Kriyang, Shah Singh, Jugdutt Zaliman, Sauli, Dr. izza@unimap.edu.my nimohdnor@students.latrobe.edu.au k.shah@latrobe.edu.au Jack.Singh@latrobe.edu.au zaliman@unimap.edu.my Fbar Fbar filter Ku-band Rf mems Link to publisher's homepage at http://www.ttp.net/ This paper presents the design of a Film Bulk Acoustic Wave Resonators (FBARs) operating in Ku-band. The one-dimensional (1-D) numerical and the three-dimension (3-D) Finite Element Method (FEM) simulation results are analysed and compared. The results show that coupling coefficient (k2 eff) up to 6.5% can be obtained with optimised thickness ratio of electrode/piezoelectric layers of operating frequencies greater than 15GHz. The FBARs have areas of 1.69x10-4μm2 and 7.84x10-4μm2 for series resonance frequency of 14.7GHz and 15.9GHz respectively and achieves quality (Q) factor of 300. The designed FBAR filter operating in Ku-band has the centre frequency of 15.5 GHz, the insertion loss of 3.5dB, out-of-band rejection of 13dB and fractional bandwidth of 6.6% 2014-05-28T08:52:31Z 2014-05-28T08:52:31Z 2013 Article Advanced Materials Research, vol. 662, 2013, pages 556-561 978-303785640-6 1022-6680 http://www.scientific.net/AMR.662.556 http://dspace.unimap.edu.my:80/dspace/handle/123456789/34837 en Trans Tech Publications |
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Fbar Fbar filter Ku-band Rf mems |
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Fbar Fbar filter Ku-band Rf mems Nurul Izza, Mohd Nor, Dr. Kriyang, Shah Singh, Jugdutt Zaliman, Sauli, Dr. Design and simulation of film bulk acoustic wave resonator in kuband |
| description |
Link to publisher's homepage at http://www.ttp.net/ |
| author2 |
izza@unimap.edu.my |
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izza@unimap.edu.my Nurul Izza, Mohd Nor, Dr. Kriyang, Shah Singh, Jugdutt Zaliman, Sauli, Dr. |
| format |
Article |
| author |
Nurul Izza, Mohd Nor, Dr. Kriyang, Shah Singh, Jugdutt Zaliman, Sauli, Dr. |
| author_sort |
Nurul Izza, Mohd Nor, Dr. |
| title |
Design and simulation of film bulk acoustic wave resonator in kuband |
| title_short |
Design and simulation of film bulk acoustic wave resonator in kuband |
| title_full |
Design and simulation of film bulk acoustic wave resonator in kuband |
| title_fullStr |
Design and simulation of film bulk acoustic wave resonator in kuband |
| title_full_unstemmed |
Design and simulation of film bulk acoustic wave resonator in kuband |
| title_sort |
design and simulation of film bulk acoustic wave resonator in kuband |
| publisher |
Trans Tech Publications |
| publishDate |
2014 |
| url |
http://dspace.unimap.edu.my:80/dspace/handle/123456789/34837 |
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1643797614017118208 |