Chrome mask design for microfluidic fabrication

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Main Authors:	Perumal, Veeradasan, Uda, Hashim, Prof. Dr.
Other Authors:	vradass@gmail.com
Format:	Article
Language:	English
Published:	Trans Tech Publications 2014
Subjects:	Mask design Master template Microfluidic Negative photoresists and pattern transfer
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/34917
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Institution:	Universiti Malaysia Perlis
Language:	English

id	my.unimap-34917
record_format	dspace
spelling	my.unimap-349172014-06-01T04:59:18Z Chrome mask design for microfluidic fabrication Perumal, Veeradasan Uda, Hashim, Prof. Dr. vradass@gmail.com uda@unimap.edu.my Mask design Master template Microfluidic Negative photoresists and pattern transfer Link to publisher's homepage at http://www.ttp.net/ This paper presents a simple and effective method to design chrome mask for microfludic fabrication. Microfluidic fabrication involves 9 major step and mainly depends on the master mold template formation by SU-8 photoresists using conventional photolithography process The chrome mask was design using AutoCAD software. Essentially, mask is a crucial element in a microfluidic fabrication in which resolution requirements and precise alignment are vital, each mask needs to be precisely aligned with original alignment mark. Otherwise, it can't successfully transfer the original pattern to the wafer surface causing microchannel formation failure. Thus, the initial design is compared with the fabricated chrome mask to achieved a better result during device fabrication. 2014-06-01T04:59:18Z 2014-06-01T04:59:18Z 2013 Article Advanced Materials Research, vol. 795, 2013, pages 276-280 978-303785811-0 1022-6680 http://www.scientific.net/AMR.795.276 http://dspace.unimap.edu.my:80/dspace/handle/123456789/34917 en Trans Tech Publications
institution	Universiti Malaysia Perlis
building	UniMAP Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Malaysia Perlis
content_source	UniMAP Library Digital Repository
url_provider	http://dspace.unimap.edu.my/
language	English
topic	Mask design Master template Microfluidic Negative photoresists and pattern transfer
spellingShingle	Mask design Master template Microfluidic Negative photoresists and pattern transfer Perumal, Veeradasan Uda, Hashim, Prof. Dr. Chrome mask design for microfluidic fabrication
description	Link to publisher's homepage at http://www.ttp.net/
author2	vradass@gmail.com
author_facet	vradass@gmail.com Perumal, Veeradasan Uda, Hashim, Prof. Dr.
format	Article
author	Perumal, Veeradasan Uda, Hashim, Prof. Dr.
author_sort	Perumal, Veeradasan
title	Chrome mask design for microfluidic fabrication
title_short	Chrome mask design for microfluidic fabrication
title_full	Chrome mask design for microfluidic fabrication
title_fullStr	Chrome mask design for microfluidic fabrication
title_full_unstemmed	Chrome mask design for microfluidic fabrication
title_sort	chrome mask design for microfluidic fabrication
publisher	Trans Tech Publications
publishDate	2014
url	http://dspace.unimap.edu.my:80/dspace/handle/123456789/34917
_version_	1643797654950379520

Chrome mask design for microfluidic fabrication

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