Improvement in processing of micro and nano structure fabrication using O₂ plasma

Improvement in processing of micro and nano structure fabrication using O₂ plasma

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Bibliographic Details
Main Authors: Ahmed, N. M., Dhahi, Th Sabar, Uda, Hashim
Other Authors: sthikra@yahoo.com.
Format: Article
Language:English
Published: Universiti Malaysia Perlis 2016
Subjects:
Plasma Etching
Photolithography
Nanogap
Electrodes
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41229
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41229

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