Response surface methodology (RSM) in fabrication of nanostructured silicon
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Trans Tech Publications Ltd
2016
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my.unimap-414612016-05-04T08:18:07Z Response surface methodology (RSM) in fabrication of nanostructured silicon Ayu Wazira, Azhari Kamaruzzaman, Sopian Dewi Suriyani, Che Halin Abdul Haqi, Ibrahim Saleem Hussain, Zaidi abdulhaqi@unimap.edu.my Box-behnken design DoE MACE RSM Si nanostructures Link to publisher's homepage at http://www.ttp.net/ In this paper, a respond surface methodology (RSM) model has been developed using three levels Box-Benkhen experimental design (BBD) technique to study the influence of several metal-assisted chemical etching (MACE) process variables on the properties of nanostructured silicon (Si) wafer. Five process variables are examined i.e. concentrations of silver (Ag), hydrofluoric acid (HF), deposition time, H2O2concentration and etching time as a function of etching rate. Design-Expert®software (version 7.1) is used in formulating the RSM model of five factors with 46 experiments. A regression quadratic model is developed to correlate the process variables where the most significant factors are identified and validated using analysis of variance (ANOVA). The model for etching rate is found to be significant with R2of 0.8, where both Ag concentrations and etching time are the major influence. 2016-05-04T08:18:07Z 2016-05-04T08:18:07Z 2016 Article Materials Science Forum, vol. 857, 2016, pages 151-155 0255-5476 http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41461 http://dx.doi.org/10.4028/www.scientific.net/MSF.857.151 en International Conference on Advanced Materials Engineering and Technology;ICAMET 2015 Trans Tech Publications Ltd |
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English |
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Box-behnken design DoE MACE RSM Si nanostructures |
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Box-behnken design DoE MACE RSM Si nanostructures Ayu Wazira, Azhari Kamaruzzaman, Sopian Dewi Suriyani, Che Halin Abdul Haqi, Ibrahim Saleem Hussain, Zaidi Response surface methodology (RSM) in fabrication of nanostructured silicon |
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Link to publisher's homepage at http://www.ttp.net/ |
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abdulhaqi@unimap.edu.my |
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abdulhaqi@unimap.edu.my Ayu Wazira, Azhari Kamaruzzaman, Sopian Dewi Suriyani, Che Halin Abdul Haqi, Ibrahim Saleem Hussain, Zaidi |
| format |
Article |
| author |
Ayu Wazira, Azhari Kamaruzzaman, Sopian Dewi Suriyani, Che Halin Abdul Haqi, Ibrahim Saleem Hussain, Zaidi |
| author_sort |
Ayu Wazira, Azhari |
| title |
Response surface methodology (RSM) in fabrication of nanostructured silicon |
| title_short |
Response surface methodology (RSM) in fabrication of nanostructured silicon |
| title_full |
Response surface methodology (RSM) in fabrication of nanostructured silicon |
| title_fullStr |
Response surface methodology (RSM) in fabrication of nanostructured silicon |
| title_full_unstemmed |
Response surface methodology (RSM) in fabrication of nanostructured silicon |
| title_sort |
response surface methodology (rsm) in fabrication of nanostructured silicon |
| publisher |
Trans Tech Publications Ltd |
| publishDate |
2016 |
| url |
http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41461 |
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1643799673845055488 |