A review: Properties of silicon carbide materials in MEMS application

A review: Properties of silicon carbide materials in MEMS application

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Bibliographic Details
Main Authors: Noraini, Marsi, Burhanuddin, Yeop Majlis, Faisal Mohd, Yasin, Hafzaliza Erny, Zainal Abidin, Azrul Azlan, Hamzah
Other Authors: mnoraini@uthm.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2021
Subjects:
MEMS
Silicon carbide
High temperature
Radiation
Sensor
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69528
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69528

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