Design and fabrication of uniform aluminium pores for planar microfiltration system

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Bibliographic Details
Main Authors:	Kamarul ‘Asyikin, Mustafa, Jumril, Yunas, Azrul Azlan, Hamzah, Burhanuddin, Yeop Majlis
Other Authors:	burhan@ukm.edu.my
Format:	Article
Language:	English
Published:	Universiti Malaysia Perlis (UniMAP) 2021
Subjects:	Etching MEMS Planar microfiltration system Silicon S1813 Photoresist Uniform pore
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/69691
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Institution:	Universiti Malaysia Perlis
Language:	English

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