SOI Single-Electron Transistors (SET) design and process development

Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.

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Bibliographic Details
Main Authors:	Amiza, Rasmi, Mohammad Nuzaihan, Md Nor, Uda, Hashim
Format:	Working Paper
Language:	English
Published:	Kolej Universiti Kejuruteraan Utara Malaysia 2009
Subjects:	Single-electron transistor (SET) Single-electron transistor (SET) > Design and construction Transistors Litography Electron Beam Lithography (EBL) Lithography, Electron beam
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/7104
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Institution:	Universiti Malaysia Perlis
Language:	English

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