Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates
Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.
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Kolej Universiti Kejuruteraan Utara Malaysia
2009
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my.unimap-71332009-09-03T03:13:11Z Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates Mohd Zainizan, Sahdan Uda, Hashim Hashim, Saim Marlia, Morsin Mask fabrication Pattern transfer Photolithography AutoCAD MOSFET Mask -- Design and construction Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. In teaching undergraduates program in MOSFET fabrication, mask set is one of the major problem since the cost is extensively high. The purpose of these masks is to define certain region on a wafer. In this work, a low cost mask set is fabricated with a simple technology. An economical solution of mask sets using transparency films with various channel lengths from 250um to 20 um was produced. Four mask sets of MOSFET were designed using AutoCAD 2002 drawing tools and then printed on the transparency film. Contact printing method was utilized to transfer the mask layouts onto a 4-inch silicon wafer using standard photolithography techniques to check the line uniformity. This task was done in KUKUM Microfabrication Cleanroom. The detail flow of mask making and the resist pattern on the wafer are also presented in this paper. Optical observation shows that the mask layouts were successfully transferred onto photoresist with minimum variation. Our mask sets were really cost effective and practical for teaching undergraduates purposes. 2009-09-03T03:13:10Z 2009-09-03T03:13:10Z 2005-05-18 Working Paper p.53-57 http://hdl.handle.net/123456789/7133 en Proceeding sof the 1st National Conference on Electronic Design Kolej Universiti Kejuruteraan Utara Malaysia |
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Malaysia |
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Universiti Malaysia Perlis |
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| language |
English |
| topic |
Mask fabrication Pattern transfer Photolithography AutoCAD MOSFET Mask -- Design and construction |
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Mask fabrication Pattern transfer Photolithography AutoCAD MOSFET Mask -- Design and construction Mohd Zainizan, Sahdan Uda, Hashim Hashim, Saim Marlia, Morsin Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates |
| description |
Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar. |
| format |
Working Paper |
| author |
Mohd Zainizan, Sahdan Uda, Hashim Hashim, Saim Marlia, Morsin |
| author_facet |
Mohd Zainizan, Sahdan Uda, Hashim Hashim, Saim Marlia, Morsin |
| author_sort |
Mohd Zainizan, Sahdan |
| title |
Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates |
| title_short |
Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates |
| title_full |
Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates |
| title_fullStr |
Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates |
| title_full_unstemmed |
Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates |
| title_sort |
design and fabricate mosfet masks at kukum microfabrication cleanroom for teaching undergraduates |
| publisher |
Kolej Universiti Kejuruteraan Utara Malaysia |
| publishDate |
2009 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/7133 |
| _version_ |
1643788689685348352 |