MEMS piezoresistive accelerometer sensor for gait analysis

Master of Science in Microelectronic Systems Design Engineering

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Bibliographic Details
Main Author:	Siti Nurdiyana, Abd. Rashid
Other Authors:	Yufridin, Wahab, Assoc. Prof. Dr.
Format:	Dissertation
Language:	English
Published:	Universiti Malaysia Perlis (UniMAP) 2017
Subjects:	Microelectromechanical systems Accelerometers Gait in humans Piezoelectric materials
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76625
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Institution:	Universiti Malaysia Perlis
Language:	English

id	my.unimap-76625
record_format	dspace
spelling	my.unimap-766252022-10-26T00:42:22Z MEMS piezoresistive accelerometer sensor for gait analysis Siti Nurdiyana, Abd. Rashid Yufridin, Wahab, Assoc. Prof. Dr. Microelectromechanical systems Accelerometers Gait in humans Piezoelectric materials Master of Science in Microelectronic Systems Design Engineering Microelectromechanical Systems (MEMS) based accelerometers have been reported as one of the most popular applications in sensing methods. For establishing the microsystem technology, Finite Element Analysis (FEA) has been reported as the most time and cost effective way to build a model for simulation. Present work focuses on designs, analysis and simulations of MEMS piezoresistive accelerometer sensor for gait analysis of different size. The structure of the accelerometer is chosen to reduce the cross-axis sensitivity by selecting an appropriate material and suitable design parameters. The accelerometers are doped with p-type (boron diffused) silicon as their piezoresistor. A solid model has been simulated using COMSOL Multiphysics software to find von mises stress, displacement and sensitivity of the proposed designs. The designed accelerometers are based on the piezoresistive effect where the value of a resistor changes with applied mechanical stress. The changes in the resistors values are then converted to an output voltage using a Wheatstone bridge. The simulation shows that Design 1 has maximum value of spring constant and maximum displacement which is 91800N/m and 9.21x10-8 μm respectively. Design 2 has maximum value of Von mises stress which is 0.001684MPa while Design 3 has the lowest value of spring constant, 3400N/m. 2017 2022-10-26T00:42:22Z 2022-10-26T00:42:22Z Dissertation http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76625 en Universiti Malaysia Perlis (UniMAP) Universiti Malaysia Perlis (UniMAP) School of Microelectronic Engineering
institution	Universiti Malaysia Perlis
building	UniMAP Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Malaysia Perlis
content_source	UniMAP Library Digital Repository
url_provider	http://dspace.unimap.edu.my/
language	English
topic	Microelectromechanical systems Accelerometers Gait in humans Piezoelectric materials
spellingShingle	Microelectromechanical systems Accelerometers Gait in humans Piezoelectric materials Siti Nurdiyana, Abd. Rashid MEMS piezoresistive accelerometer sensor for gait analysis
description	Master of Science in Microelectronic Systems Design Engineering
author2	Yufridin, Wahab, Assoc. Prof. Dr.
author_facet	Yufridin, Wahab, Assoc. Prof. Dr. Siti Nurdiyana, Abd. Rashid
format	Dissertation
author	Siti Nurdiyana, Abd. Rashid
author_sort	Siti Nurdiyana, Abd. Rashid
title	MEMS piezoresistive accelerometer sensor for gait analysis
title_short	MEMS piezoresistive accelerometer sensor for gait analysis
title_full	MEMS piezoresistive accelerometer sensor for gait analysis
title_fullStr	MEMS piezoresistive accelerometer sensor for gait analysis
title_full_unstemmed	MEMS piezoresistive accelerometer sensor for gait analysis
title_sort	mems piezoresistive accelerometer sensor for gait analysis
publisher	Universiti Malaysia Perlis (UniMAP)
publishDate	2017
url	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76625
_version_	1751537951819431936

MEMS piezoresistive accelerometer sensor for gait analysis

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