Mask Making Process (Positive and Negative Mask)

Mask Making Process (Positive and Negative Mask)

PECIPTA 2007 dianjurkan oleh Kementerian Pengajian Tinggi Malaysia (KPTM) dengan kerjasama Universiti Sains Malaysia (USM) pada 10 - 12 Ogos 2007 di Pusat Konvensyen Kuala Lumpur (KLCC), Kuala Lumpur.

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Bibliographic Details
Main Authors: Uda, Hashim, Prof. Dr., Nur Hamidah, Abdul Halim, Mohamad Nuzaihan, Md Nor, Zul Azhar, Zahid Jamal, Prof. Dr.
Other Authors: uda@unimap.edu.my
Format: Image
Language:English
Published: Kementerian Pengajian Tinggi Malaysia (KPTM) 2010
Subjects:
Mask
E-beam lithography (EBL)
EBL System
UniMAP > Research and development
UniMAP > Exhibition
PECIPTA 2007
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/8172
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my/xmlui/handle/123456789/8172

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