Electrode design and planar uniformity of anodically etched small area porous silicon
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American Institute of Physics
2010
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my.unimap-88262010-08-18T07:33:51Z Electrode design and planar uniformity of anodically etched small area porous silicon Ahmed, N. M. Zaliman, Sauli, Prof. Madya Uda, Hashim, Prof. Dr. Zul Azhar, Zahid Jamal, Prof. Dr. Electrochemical Photoluminescence Porous silicon Electrochemical electrodes Photoluminescence Nanostructured materials International Conference on Nanoscience and Nanotechnology Link to publisher's homepage at http://www.aip.org/ Porous silicon layer microstructure is sensitive to many parameters, which need to be controlled during etching. These include not only anodization time, current density, applied potential and electrolyte composition but also the structure of electrodes. In the electrochemical formation cell of porous silicon the structure of electrodes greatly influences the planar uniformity of the porous silicon layer. In this paper a systematic study of the planar uniformity of small area porous silicon layer formed by different electrode structure is reported based on photoluminescence. A new design of the electrode structure is developed for achieving satisfactory planar uniformity of small area porous silicon layer. 2010-08-18T07:33:51Z 2010-08-18T07:33:51Z 2009-06-01 Working Paper Vol. 1136, 2009, p.161-165 0094-243X http://link.aip.org/link/?APCPCS/1136/161/1 http://hdl.handle.net/123456789/8826 en Proceedings of the International Conference on Nanoscience and Nanotechnology 2008 American Institute of Physics |
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Universiti Malaysia Perlis |
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Malaysia |
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Universiti Malaysia Perlis |
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| language |
English |
| topic |
Electrochemical Photoluminescence Porous silicon Electrochemical electrodes Photoluminescence Nanostructured materials International Conference on Nanoscience and Nanotechnology |
| spellingShingle |
Electrochemical Photoluminescence Porous silicon Electrochemical electrodes Photoluminescence Nanostructured materials International Conference on Nanoscience and Nanotechnology Ahmed, N. M. Zaliman, Sauli, Prof. Madya Uda, Hashim, Prof. Dr. Zul Azhar, Zahid Jamal, Prof. Dr. Electrode design and planar uniformity of anodically etched small area porous silicon |
| description |
Link to publisher's homepage at http://www.aip.org/ |
| format |
Working Paper |
| author |
Ahmed, N. M. Zaliman, Sauli, Prof. Madya Uda, Hashim, Prof. Dr. Zul Azhar, Zahid Jamal, Prof. Dr. |
| author_facet |
Ahmed, N. M. Zaliman, Sauli, Prof. Madya Uda, Hashim, Prof. Dr. Zul Azhar, Zahid Jamal, Prof. Dr. |
| author_sort |
Ahmed, N. M. |
| title |
Electrode design and planar uniformity of anodically etched small area porous silicon |
| title_short |
Electrode design and planar uniformity of anodically etched small area porous silicon |
| title_full |
Electrode design and planar uniformity of anodically etched small area porous silicon |
| title_fullStr |
Electrode design and planar uniformity of anodically etched small area porous silicon |
| title_full_unstemmed |
Electrode design and planar uniformity of anodically etched small area porous silicon |
| title_sort |
electrode design and planar uniformity of anodically etched small area porous silicon |
| publisher |
American Institute of Physics |
| publishDate |
2010 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/8826 |
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1643789216478396416 |