Incoming Work-In-Progress Prediction in Semiconductor Fabrication Foundry Using Long Short-Term Memory

Preventive maintenance activities require a tool to be offline for long hour in order to perform the prescribed maintenance activities. Although preventive maintenance is crucial to ensure operational reliability and efficiency of the tool, long hour of preventive maintenance activities increases th...

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Bibliographic Details
Main Authors: Tin, Tze Chiang, Chiew, Kang Leng, Phang, Siew Chee, Sze, San Nah, Tan, Pei San
Format: Article
Language:English
Published: Hindawi Publishing 2019
Subjects:
Online Access:http://ir.unimas.my/id/eprint/23512/1/Incoming%20Work-In-Progress%20Prediction%20in%20Semiconductor.pdf
http://ir.unimas.my/id/eprint/23512/
https://www.hindawi.com/journals/cin/2019/8729367/
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Institution: Universiti Malaysia Sarawak
Language: English