Improved Delayering Method for SOI Wafer Processing
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| Format: | E-Article |
| Language: | English |
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IEEE
2018
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| Online Access: | http://ir.unimas.my/id/eprint/24567/1/Improved%20Delayering%20Method%20for%20SOI%20Wafer%20Processing%28abstract%29.pdf http://ir.unimas.my/id/eprint/24567/ http://ieeexplore.ieee.org.remotexs.unimas.my/document/8452522 |
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| Institution: | Universiti Malaysia Sarawak |
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my.unimas.ir.245672019-07-31T03:39:14Z http://ir.unimas.my/id/eprint/24567/ Improved Delayering Method for SOI Wafer Processing Handie, Ahmataku Shahrol, Mohamaddan Mahshuri, Yusof Aidil Azli, Alias Kuryati, Kipli Norhayati, Soin TK Electrical engineering. Electronics Nuclear engineering IEEE 2018 E-Article PeerReviewed text en http://ir.unimas.my/id/eprint/24567/1/Improved%20Delayering%20Method%20for%20SOI%20Wafer%20Processing%28abstract%29.pdf Handie, Ahmataku and Shahrol, Mohamaddan and Mahshuri, Yusof and Aidil Azli, Alias and Kuryati, Kipli and Norhayati, Soin (2018) Improved Delayering Method for SOI Wafer Processing. 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), 2018. ISSN ISBN: 978-1-5386-4929-9 http://ieeexplore.ieee.org.remotexs.unimas.my/document/8452522 DOI: 10.1109/IPFA.2018.8452522 |
| institution |
Universiti Malaysia Sarawak |
| building |
Centre for Academic Information Services (CAIS) |
| collection |
Institutional Repository |
| continent |
Asia |
| country |
Malaysia |
| content_provider |
Universiti Malaysia Sarawak |
| content_source |
UNIMAS Institutional Repository |
| url_provider |
http://ir.unimas.my/ |
| language |
English |
| topic |
TK Electrical engineering. Electronics Nuclear engineering |
| spellingShingle |
TK Electrical engineering. Electronics Nuclear engineering Handie, Ahmataku Shahrol, Mohamaddan Mahshuri, Yusof Aidil Azli, Alias Kuryati, Kipli Norhayati, Soin Improved Delayering Method for SOI Wafer Processing |
| format |
E-Article |
| author |
Handie, Ahmataku Shahrol, Mohamaddan Mahshuri, Yusof Aidil Azli, Alias Kuryati, Kipli Norhayati, Soin |
| author_facet |
Handie, Ahmataku Shahrol, Mohamaddan Mahshuri, Yusof Aidil Azli, Alias Kuryati, Kipli Norhayati, Soin |
| author_sort |
Handie, Ahmataku |
| title |
Improved Delayering Method for SOI Wafer Processing |
| title_short |
Improved Delayering Method for SOI Wafer Processing |
| title_full |
Improved Delayering Method for SOI Wafer Processing |
| title_fullStr |
Improved Delayering Method for SOI Wafer Processing |
| title_full_unstemmed |
Improved Delayering Method for SOI Wafer Processing |
| title_sort |
improved delayering method for soi wafer processing |
| publisher |
IEEE |
| publishDate |
2018 |
| url |
http://ir.unimas.my/id/eprint/24567/1/Improved%20Delayering%20Method%20for%20SOI%20Wafer%20Processing%28abstract%29.pdf http://ir.unimas.my/id/eprint/24567/ http://ieeexplore.ieee.org.remotexs.unimas.my/document/8452522 |
| _version_ |
1644514354682396672 |