Surface passivation of InAs avalanche photodiodes for low-noise infrared imaging

Avalanche photodiodes; Characterization; Diodes; Infrared imaging; Leakage currents; Nitrides; Photodiodes; Photonics; Silica; Silicon nitride; Thermography (imaging); B-staged bisbenzocyclobutene; Current-voltage characterization; InAs; Low noise; Surface leakage currents; Surface passivation; Pass...

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Main Authors: Ker P.J., Marshall A.R.J., Tan C.H., David J.P.R.
Other Authors: 37461740800
Format: Conference Paper
Published: Institute of Electrical and Electronics Engineers Inc. 2023
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Institution: Universiti Tenaga Nasional
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spelling my.uniten.dspace-226872023-05-29T14:11:39Z Surface passivation of InAs avalanche photodiodes for low-noise infrared imaging Ker P.J. Marshall A.R.J. Tan C.H. David J.P.R. 37461740800 7401645580 57189468185 25647614700 Avalanche photodiodes; Characterization; Diodes; Infrared imaging; Leakage currents; Nitrides; Photodiodes; Photonics; Silica; Silicon nitride; Thermography (imaging); B-staged bisbenzocyclobutene; Current-voltage characterization; InAs; Low noise; Surface leakage currents; Surface passivation; Passivation The effect of surface passivation on the etched-mesa InAs diodes was investigated by carrying out the fabrication and passivation of InAs diodes. Extensive and detailed current-voltage characterization was done to determine the most suitable type of insulating material for the surface passivation. SU-8, silicon nitride, silicon dioxide and B-staged Bisbenzocyclobutene were used for the purpose of minimizing the conductivity of the etched mesa surface of InAs diodes. The forward- and reverse-biased characteristics of InAs diodes were measured at room temperature and 77 K in order to carefully investigate the effect of different surface passivation schemes. The results of this work categorically indicated that SU-8 is the most effective surface passivation material for InAs diodes, whereas silicon nitride and silicon dioxide have contributed to an even higher surface leakage current. Furthermore, SU-8 passivated InAs diodes were more sustainable to high bias voltages and its robustness increases the opportunity of its utilization for practical applications such as infrared imaging. � 2016 IEEE. Final 2023-05-29T06:11:39Z 2023-05-29T06:11:39Z 2016 Conference Paper 10.1109/ICP.2016.7510018 2-s2.0-84981736080 https://www.scopus.com/inward/record.uri?eid=2-s2.0-84981736080&doi=10.1109%2fICP.2016.7510018&partnerID=40&md5=4a99f3d36c39853bf96d280df191d5a3 https://irepository.uniten.edu.my/handle/123456789/22687 7510018 All Open Access, Green Institute of Electrical and Electronics Engineers Inc. Scopus
institution Universiti Tenaga Nasional
building UNITEN Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Tenaga Nasional
content_source UNITEN Institutional Repository
url_provider http://dspace.uniten.edu.my/
description Avalanche photodiodes; Characterization; Diodes; Infrared imaging; Leakage currents; Nitrides; Photodiodes; Photonics; Silica; Silicon nitride; Thermography (imaging); B-staged bisbenzocyclobutene; Current-voltage characterization; InAs; Low noise; Surface leakage currents; Surface passivation; Passivation
author2 37461740800
author_facet 37461740800
Ker P.J.
Marshall A.R.J.
Tan C.H.
David J.P.R.
format Conference Paper
author Ker P.J.
Marshall A.R.J.
Tan C.H.
David J.P.R.
spellingShingle Ker P.J.
Marshall A.R.J.
Tan C.H.
David J.P.R.
Surface passivation of InAs avalanche photodiodes for low-noise infrared imaging
author_sort Ker P.J.
title Surface passivation of InAs avalanche photodiodes for low-noise infrared imaging
title_short Surface passivation of InAs avalanche photodiodes for low-noise infrared imaging
title_full Surface passivation of InAs avalanche photodiodes for low-noise infrared imaging
title_fullStr Surface passivation of InAs avalanche photodiodes for low-noise infrared imaging
title_full_unstemmed Surface passivation of InAs avalanche photodiodes for low-noise infrared imaging
title_sort surface passivation of inas avalanche photodiodes for low-noise infrared imaging
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2023
_version_ 1806427411553714176