Deposition and characterization of RF-sputtered-Ta2O5 thin films for O2 reduction reaction in polymer electrolyte membrane fuel cells (PEMFC)

Annealing; Catalysts; Cyclic voltammetry; Deposition; Electrolytic reduction; Gas fuel purification; Polyelectrolytes; Polymer films; Structural properties; Substrates; Tantalum oxides; Thin films; Orthorhombic phasis; Oxygen reduction reaction; Potentiostatic electrolysis; Rate of deposition; Silic...

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Main Authors: Samsudin N., Ferdaous M.T., Shahahmadi S.A., Mustafa S.N., Akhtaruzzaman M., Sopian K., Chelvanathan P., Amin N.
Other Authors: 57220937524
Format: Article
Published: Elsevier GmbH 2023
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Institution: Universiti Tenaga Nasional
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spelling my.uniten.dspace-236872023-05-29T14:51:02Z Deposition and characterization of RF-sputtered-Ta2O5 thin films for O2 reduction reaction in polymer electrolyte membrane fuel cells (PEMFC) Samsudin N. Ferdaous M.T. Shahahmadi S.A. Mustafa S.N. Akhtaruzzaman M. Sopian K. Chelvanathan P. Amin N. 57220937524 55567613100 55567116600 57192685814 57195441001 7003375391 35766323200 7102424614 Annealing; Catalysts; Cyclic voltammetry; Deposition; Electrolytic reduction; Gas fuel purification; Polyelectrolytes; Polymer films; Structural properties; Substrates; Tantalum oxides; Thin films; Orthorhombic phasis; Oxygen reduction reaction; Potentiostatic electrolysis; Rate of deposition; Silicon substrates; Substrate temperature; Ta2O5 thin films; Ta2O5sputtering; Proton exchange membrane fuel cells (PEMFC) Ta2O5 thin films, proposed as the replacement of the precious Pt-based electro-catalyst in fuel cells, were sputtered on laser textured silicon substrate at 200 �C and then air annealed at 350 �C, 400 �C and 450 �C with the aim to improve crystallinity and uniformity. Characterization such as FESEM, XRD, Hall effect and Cyclic Voltammetry were employed to investigate the morphological, structural, electrical and electrochemical properties of the as-sputtered as well as annealed samples. Initial results showed that the films obtained by increasing the substrate temperature during sputtering are smoother and have better adhesion to the etched silicon substrates. It has also been observed that the rate of deposition increases resulting in thicker films for longer deposition time at higher temperature. Upon annealing, Ta2O5 films achieved better crystallinity consisting of orthorhombic phases. The average thicknesses of the films are in the range of 400 nm�700 nm. The proposed catalyst also shows better enhancement for oxygen reduction reaction (ORR) in prolonged time of continuous potentiostatic electrolysis as to be used in fuel cells. � 2018 Elsevier GmbH Final 2023-05-29T06:51:02Z 2023-05-29T06:51:02Z 2018 Article 10.1016/j.ijleo.2018.05.106 2-s2.0-85047803766 https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047803766&doi=10.1016%2fj.ijleo.2018.05.106&partnerID=40&md5=65d837c5f00b3bad4170d36117124d5a https://irepository.uniten.edu.my/handle/123456789/23687 170 295 303 Elsevier GmbH Scopus
institution Universiti Tenaga Nasional
building UNITEN Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Tenaga Nasional
content_source UNITEN Institutional Repository
url_provider http://dspace.uniten.edu.my/
description Annealing; Catalysts; Cyclic voltammetry; Deposition; Electrolytic reduction; Gas fuel purification; Polyelectrolytes; Polymer films; Structural properties; Substrates; Tantalum oxides; Thin films; Orthorhombic phasis; Oxygen reduction reaction; Potentiostatic electrolysis; Rate of deposition; Silicon substrates; Substrate temperature; Ta2O5 thin films; Ta2O5sputtering; Proton exchange membrane fuel cells (PEMFC)
author2 57220937524
author_facet 57220937524
Samsudin N.
Ferdaous M.T.
Shahahmadi S.A.
Mustafa S.N.
Akhtaruzzaman M.
Sopian K.
Chelvanathan P.
Amin N.
format Article
author Samsudin N.
Ferdaous M.T.
Shahahmadi S.A.
Mustafa S.N.
Akhtaruzzaman M.
Sopian K.
Chelvanathan P.
Amin N.
spellingShingle Samsudin N.
Ferdaous M.T.
Shahahmadi S.A.
Mustafa S.N.
Akhtaruzzaman M.
Sopian K.
Chelvanathan P.
Amin N.
Deposition and characterization of RF-sputtered-Ta2O5 thin films for O2 reduction reaction in polymer electrolyte membrane fuel cells (PEMFC)
author_sort Samsudin N.
title Deposition and characterization of RF-sputtered-Ta2O5 thin films for O2 reduction reaction in polymer electrolyte membrane fuel cells (PEMFC)
title_short Deposition and characterization of RF-sputtered-Ta2O5 thin films for O2 reduction reaction in polymer electrolyte membrane fuel cells (PEMFC)
title_full Deposition and characterization of RF-sputtered-Ta2O5 thin films for O2 reduction reaction in polymer electrolyte membrane fuel cells (PEMFC)
title_fullStr Deposition and characterization of RF-sputtered-Ta2O5 thin films for O2 reduction reaction in polymer electrolyte membrane fuel cells (PEMFC)
title_full_unstemmed Deposition and characterization of RF-sputtered-Ta2O5 thin films for O2 reduction reaction in polymer electrolyte membrane fuel cells (PEMFC)
title_sort deposition and characterization of rf-sputtered-ta2o5 thin films for o2 reduction reaction in polymer electrolyte membrane fuel cells (pemfc)
publisher Elsevier GmbH
publishDate 2023
_version_ 1806424323308650496