Optimization of process parameters for threshold voltage and leakage current based on taguchi method

• Main Authors: Noor Faizah Z.A., Ahmad I., Ker P.J., Menon P.S., Afifah Maheran A.H., Mah S.K.
• Other Authors: 56395444600
• Format: Article
• Published: Universiti Teknikal Malaysia Melaka 2023
• Institution: Universiti Tenaga Nasional

In this study, the effect of process parameters on the threshold voltage (Vth) and leakage current (Ileak) were explored and the optimization of these parameters were carried out using the Taguchi method. The virtual device was initially constructed using ATHENA and ATLAS environment in Silvaco Tech...