Physical and electrical properties of molybdenum thin films grown by DC magnetron sputtering for photovoltaic application
DC magnetron sputtering was utilized to grow thin layers of molybdenum (Mo) on top of soda lime glass substrates. Deposition power was varied for suitable characteristics of films grown at various DC powers, i.e. 100 W, 150 W and 200 W. Thin Mo film of approximately 580 nm thickness was successfully...
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Main Authors: | , , , , , , |
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Format: | Article |
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Elsevier B.V.
2023
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Institution: | Universiti Tenaga Nasional |