Impact of ar flow rates on micro-structural properties of ws2 thin film by rf magnetron sputtering
Tungsten disulfide (WS2) thin films were deposited on soda-lime glass (SLG) substrates using radio frequency (RF) magnetron sputtering at different Ar flow rates (3 to 7 sccm). The effect of Ar flow rates on the structural, morphology, and electrical properties of the WS2 thin films was investigated...
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| Main Authors: | , , , , , , |
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| Format: | Article |
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MDPI AG
2023
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| Institution: | Universiti Tenaga Nasional |