Create High-Aspect-Ratio Silicon Nanostructures Using Metal-Assisted Chemical Etching (MACE) Technique
Aspect ratio; Catalysts; Efficiency; Etching; Hydrofluoric acid; Metals; Microelectronics; Microstructure; Photonic devices; Silicon solar cells; Silicon wafers; Chemical etching technique; High aspect ratio; High aspect ratio microstructures; Metal-assisted chemical etching; Silicon nano structure...
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2023
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| Institution: | Universiti Tenaga Nasional |