Throughput improvement in semiconductor fabrication for 0.13?m technology

• Main Authors: Balakrishna P., Chik M.A., Ahmad I., Mohamad B.
• Other Authors: 56736340400
• Format: Conference paper
• Published: 2023
• Subjects: Cycle Time; Priority; Product Mixed; Silicon Wafer Manufacturing Plant (Fab); Simulation; Work In Progress (WIP); Computer software; Fabrication; Semiconducting silicon compounds; Specifications; Cycle time; Work in progress; Silicon wafers
• Institution: Universiti Tenaga Nasional

Semiconductor fabrication is known to be the one of the most complex manufacturing operations. This is due to total processing steps in semiconductor fabrication is as high as 1000 steps and the process will re-enter through same equipments multiple times. This will always pose a challenge to the op...