Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304

The capabilities of a low frequency flat spiralled coil rf ICP source to nitride austenitic stainless steel type AISI 304 at high rates and to extremely high surface hardness are investigated. For the purpose of testing the applicability of the plasma source in industry, large surface areas were nit...

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Main Author: Chakrabarty, C.K.
Format: Article
Language:en_US
Published: 2017
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Institution: Universiti Tenaga Nasional
Language: en_US
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spelling my.uniten.dspace-57522017-12-13T08:00:11Z Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304 Chakrabarty, C.K. The capabilities of a low frequency flat spiralled coil rf ICP source to nitride austenitic stainless steel type AISI 304 at high rates and to extremely high surface hardness are investigated. For the purpose of testing the applicability of the plasma source in industry, large surface areas were nitrided and the uniformity of the case hardened layers was examined. Results indicate that the H mode rf ICP device improves on previous methods for the nitriding of stainless steel. 2017-12-08T06:45:52Z 2017-12-08T06:45:52Z 2003 Article https://www.scopus.com/record/display.uri?eid=2-s2.0-0141517578&origin=resultslist&sort=plf-f&src=s&sid=56c24357b252953d53cd7b7b67c782af&sot en_US Surface Engineering Volume 19, Issue 3, June 2003, Pages 200-203
institution Universiti Tenaga Nasional
building UNITEN Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Tenaga Nasional
content_source UNITEN Institutional Repository
url_provider http://dspace.uniten.edu.my/
language en_US
description The capabilities of a low frequency flat spiralled coil rf ICP source to nitride austenitic stainless steel type AISI 304 at high rates and to extremely high surface hardness are investigated. For the purpose of testing the applicability of the plasma source in industry, large surface areas were nitrided and the uniformity of the case hardened layers was examined. Results indicate that the H mode rf ICP device improves on previous methods for the nitriding of stainless steel.
format Article
author Chakrabarty, C.K.
spellingShingle Chakrabarty, C.K.
Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304
author_facet Chakrabarty, C.K.
author_sort Chakrabarty, C.K.
title Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304
title_short Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304
title_full Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304
title_fullStr Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304
title_full_unstemmed Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304
title_sort use of h mode in low frequency flat spiralled coil rf inductively coupled plasma source to nitride austenitic steel type aisi 304
publishDate 2017
_version_ 1644493766795460608