Parallel scanning near-field photolithography: the Snomipede

• Main Authors: Ul-Haq, Ehtsham, Liu, Zhuming, Zhang, Yuan, Alang Ahmad, Shahrul Ainliah, Wong, Lu Shin, Armes, Steven P., Hobbs, Jamie K., Leggett, Graham J., Micklefield, Jason, Roberts, Clive J., Weaver, John M. R.
• Format: Article
• Language: English
• Published: American Chemical Society 2010
• Online Access: http://psasir.upm.edu.my/id/eprint/16036/1/Parallel%20scanning%20near-field%20photolithography%20%20the%20snomipede..pdf; http://psasir.upm.edu.my/id/eprint/16036/; http://pubs.acs.org/doi/abs/10.1021/nl1018782
• Institution: Universiti Putra Malaysia

The “Millipede”, developed by Binnig and co-workers (Bining, G. K.; et al. IBM J. Res. Devel. 2000, 44, 323.), elegantly solves the problem of the serial nature of scanning probe lithography processes, by deploying massive parallelism. Here we fuse the “Millipede” concept with scanning near-field ph...