SnO2/Pt thin film laser ablated gas sensor array
A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing an...
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my.upm.eprints.249812020-07-27T07:00:18Z http://psasir.upm.edu.my/id/eprint/24981/ SnO2/Pt thin film laser ablated gas sensor array Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO2 and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O2. A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times. MDPI 2011 Article PeerReviewed text en http://psasir.upm.edu.my/id/eprint/24981/1/24981.pdf Abadi, Mohammad Hadi Nezhad Shahrokh and Hamidon, Mohd Nizar and Shaari, Abdul Halim and Abdullah, Norhafizah and Wagiran, Rahman (2011) SnO2/Pt thin film laser ablated gas sensor array. Sensors, 11 (8). pp. 7724-7735. ISSN 1424-8220 https://www.mdpi.com/1424-8220/11/8/7724 10.3390/s110807724 |
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A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the
electrode at room temperature using the PLAD method, respectively. To ablate SnO2 and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a
power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O2. A range of spectroscopic diffraction and real space
imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array
shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times. |
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Article |
author |
Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman |
spellingShingle |
Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman SnO2/Pt thin film laser ablated gas sensor array |
author_facet |
Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman |
author_sort |
Abadi, Mohammad Hadi Nezhad Shahrokh |
title |
SnO2/Pt thin film laser ablated gas sensor array |
title_short |
SnO2/Pt thin film laser ablated gas sensor array |
title_full |
SnO2/Pt thin film laser ablated gas sensor array |
title_fullStr |
SnO2/Pt thin film laser ablated gas sensor array |
title_full_unstemmed |
SnO2/Pt thin film laser ablated gas sensor array |
title_sort |
sno2/pt thin film laser ablated gas sensor array |
publisher |
MDPI |
publishDate |
2011 |
url |
http://psasir.upm.edu.my/id/eprint/24981/1/24981.pdf http://psasir.upm.edu.my/id/eprint/24981/ https://www.mdpi.com/1424-8220/11/8/7724 |
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