TiO2 Nanoparticles Prepared by MOCVD: Effect of Temperature, Flowrate, and Precursor.
Titanium dioxide nanoparticles were produced by metal organic chemical vapour deposition method. The effect of deposition temperatures (400–900 °C), flowrates of the carrier gas (200–600 mL/min), and the precursors [titanium (IV) butoxide (TBOT) and titanium tetraisopropoxide (TTIP)] on the particle...
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Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
2013
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Online Access: | http://psasir.upm.edu.my/id/eprint/28414/ |
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Institution: | Universiti Putra Malaysia |
Language: | English |