An Experiment of Thick Film Force Sensor Using MEMS Simulation Software.

• Main Authors: Jaafar, Haslina, Isa, Maryam, Hamidon, Mohd Nizar, Shafie, Suhaidi, Wan Hassan, Wan Zuha, Hawary, Ahmad Faizul, Chong, M. H.
• Format: Article
• Language: English; English
• Published: 2013
• Online Access: http://psasir.upm.edu.my/id/eprint/28441/1/An%20Experiment%20of%20Thick%20Film%20Force%20Sensor%20Using%20MEMS%20Simulation%20Software.pdf; http://psasir.upm.edu.my/id/eprint/28441/; http://www.jatit.org/volumes/Vol47No3/fourtyseventh_volume_3_2013.php
• Institution: Universiti Putra Malaysia

Force sensor (or pressure sensor) has gained increasing interest among the researchers. Using the Microelectromechanical Systems or MEMS technology, the size of the force sensor can be miniaturized and this ignites more possible application in the field of biomedical and robotic applications. Recent...