Fabrication and simulation of single crystal p-type Si nanowire using SOI technology
Si nanowires (SiNWs) as building blocks for nanostructured materials and nanoelectronics have attracted much attention due to their major role in device fabrication. In the present work a top-down fabrication approach as atomic force microscope (AFM) nanolithography was performed on Si on insulator...
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Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2015
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Online Access: | http://psasir.upm.edu.my/id/eprint/37600/1/Fabrication%20and%20simulation%20of%20single%20crystal%20p-type%20Si%20nanowire%20using%20SOI%20technology.pdf http://psasir.upm.edu.my/id/eprint/37600/ http://www.sciencedirect.com/science/article/pii/S0169433214018212 |
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Institution: | Universiti Putra Malaysia |
Language: | English |