Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications

• Main Authors: Lee, Mai Woon, Md Razib, Nadia, Teh, Aun Shih, Bien, Daniel Chia Sheng, Chen, Soo Kien, Abdullah @ Ab. Aziz, Shahrul Azam
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2012
• Online Access: http://psasir.upm.edu.my/id/eprint/45174/1/Effect%20of%20Co%20catalyst%20on%20PECVD%20growth%20of%20carbon%20nanotubes%20for%20NEMS%20applications.pdf; http://psasir.upm.edu.my/id/eprint/45174/
• Institution: Universiti Putra Malaysia

In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube g...