Plasma polymerization of silicon-containing monomers

• Main Authors: Talib, Zainal Abidin, Kurosawa, Shigeru, Atthoff, Bjorn, Aizawa, Hidenobu, Kashima, Kazuya, Hirokawa, Tomoya, Yoshimi, Yasuo, Yoshimoto, Minoru, Hirotsu, Toshihiro, Miyake, Jun, Hilborn, Jons
• Format: Article
• Language: English; English
• Published: The Society of Photopolymer Science and Technology 2001
• Online Access: http://psasir.upm.edu.my/id/eprint/48661/1/Plasma%20polymerization%20of%20silicon-containing%20monomers.pdf; http://psasir.upm.edu.my/id/eprint/48661/7/14_129.pdf; http://psasir.upm.edu.my/id/eprint/48661/; https://www.jstage.jst.go.jp/article/photopolymer1988/14/1/14_1_129/_article
• Institution: Universiti Putra Malaysia

Plasma depositions of ultra thin films from seven silicon-containing liquid monomers were investigated using a continuos wave (CW) plasma source. The deposition rate of plasma polymerized films were determined using a quartz crystal microbalance (QCM) technique while the film composition were determ...