Top-down nanofabrication and characterization of 20 nm silicon nanowires for biosensing applications
A top-down nanofabrication approach is used to develop silicon nanowires from silicon-oninsulator (SOI) wafers and involves direct-write electron beam lithography (EBL), inductively coupled plasma-reactive ion etching (ICP-RIE) and a size reduction process. To achieve nanometer scale size, the cruci...
Saved in:
Main Authors: | , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Public Library of Science
2016
|
Online Access: | http://psasir.upm.edu.my/id/eprint/56158/1/56158.PDF http://psasir.upm.edu.my/id/eprint/56158/ |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Universiti Putra Malaysia |
Language: | English |