Capacitive pressure sensors based on MEMS, operating in harsh environments

• Main Authors: Hezarjaribi, Yadollah, Hamidon, Mohd Nizar, Keshmiri, Sayyed Hossein, Bahadorimehr, Alireza
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2008
• Online Access: http://psasir.upm.edu.my/id/eprint/69674/1/Capacitive%20pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments.pdf; http://psasir.upm.edu.my/id/eprint/69674/
• Institution: Universiti Putra Malaysia

Poly-crystalline silicon carbide (polysic) Micro-electromechanical systems (MEMS) capacitive pressure sensors operating at harsh environments (e.g. high temperature) are proposed because of SiC owing excellent electrical stability, mechanical robustness, and chemical inertness properties. The princi...