Influences of Thermal stability of Doped Indium Nitride Thin Films at Elevated Temperatures by Sol-Gel spin Coating Method
In this study, doped indium nitride (InN:Mg) thin films grown on silicon ( Ill) substrate are prepared via so l-gel spin coating method followed by nitridation process. The degree of nitrid at ion of ln 20 3 to InN was very sensitive to the nitridat ion temperature. A custo-made tube furnace was u...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48776/1/NG2.pdf%20done.pdf http://eprints.usm.my/48776/ |
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| Institution: | Universiti Sains Malaysia |
| Language: | English |