An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method
In this research, the gallium nitride (GaN) thin films were deposited on a luminium nitride on sapphire (AIN/AI2O3) substrate by sol-gel spin coating method. Simple ethanol based precursor with the addition of diethanolamine solution was used. The structural and morphology properties of synthesized...
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Main Authors: | , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2016
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Subjects: | |
Online Access: | http://eprints.usm.my/48781/1/NG10.pdf%20done.pdf http://eprints.usm.my/48781/ |
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Institution: | Universiti Sains Malaysia |
Language: | English |