Effects of Ammonia Flow Rate on the Synthesis of AIGaN Thin Films prepared via Spin Coating Approach
We report on the growth or th e aluminum gallium nitride (A IGaN) thin film s on aluminum nitride (AIN) on silicon (Ill) tem plate via sol- gel spin coating method followed by nitridation process. The nitridation process was carried out for 75 min unlk r ammonia (NH3) ambient. To investigate the ef...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48784/1/NG5.pdf%20done.pdf http://eprints.usm.my/48784/ |
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| Institution: | Universiti Sains Malaysia |
| Language: | English |