Growth And Characterization Of AlGaN Thin Films Via Sol-gel Spin Coating Method
In this study, the growth and characterization of aluminum gallium nitride (AlGaN) thin film grown on AlN/Si(Ill) template via sol-gel spin coating method were reported. The structural, morphological and optical properties of AlGaN thin film were compared with GaN thin film which prepared using the...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48788/1/NG9.pdf%20done.pdf http://eprints.usm.my/48788/ |
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| Institution: | Universiti Sains Malaysia |
| Language: | English |