Comparative Study of Gas Ratio on Indium Nitride Thin Films Grown on Flexible Substrates Prepared by Reactive Sputtering Method
In this report, indium nitride thin fi lms were deposited on kapton polyimide flexible substrate by reactive radio frequency (RF) sputtering method using an indium target in a mixture of Ar and N2 gases. The InN thin films were deposited under different gas ratio, i.e 90:10, 80 20, 70 30 and 6040 of...
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| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48806/1/NG17_OP09.pdf%20done.pdf http://eprints.usm.my/48806/ |
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| Institution: | Universiti Sains Malaysia |
| Language: | English |
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