Reactive Sputtering Growth Of Indium Nitride Thin Films On Flexible Substrate Under Different Substrate Temperatures
Indium nitride (InN) thin films were deposited on kapton polyimide substrate by using reactive gas-timing radio frequency (RF) sputtering technique. An indium target with purity of 99.999% was used. Throughout this work, the RF power and gas ratio of argon and nitrogen were maintained at 60 W and 40...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2019
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48847/1/ICoSeMT%202019%20ABSTRACT%20BOOK%20117.pdf http://eprints.usm.my/48847/ |
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| Institution: | Universiti Sains Malaysia |
| Language: | English |