Thin Film Undoped And P-Doped GaN As Sensor
A GaN thin film based sensor is demonstrated for sensing detection. The GaN thin film was grown on a sapphire substrate by using Metal Organic Chemical Vapour Deposition (MOCVD). An undoped and p-doped GaN thin film were used to investigate their reaction upon exposure. The interaction between the G...
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Main Authors: | , , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2020
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Subjects: | |
Online Access: | http://eprints.usm.my/48921/1/MNRG_MSNSB01.pdf http://eprints.usm.my/48921/ |
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Institution: | Universiti Sains Malaysia |
Language: | English |