The Role Of Growth Temperature On The Indium Incorporation Process For Mocvd Growth Of InGaN/GaN Heterostructures
This work presents the effect of growth temperature on the evolution of indium incorporation and growth process of InGaN/GaN heterostructures grown using Taiyo Nippon Sanso Corporation (TNSC) metal organic chemical vapor deposition (MOCVD) SR4000-HT system. The InGaN/GaN heterostructures were epitax...
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Main Authors: | , , , , , , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
2020
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Subjects: | |
Online Access: | http://eprints.usm.my/48969/1/MNRG_ZH09.pdf http://eprints.usm.my/48969/ |
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Institution: | Universiti Sains Malaysia |
Language: | English |