Effects Of Dry Oxidation Treaments On The Characteristics Of Gallium Oxide Thin Films Prepared Using Sol-Gel Spin Coating Method

• Main Authors: Kwok, Eunice, Hamid, Maizatul Akman Ab., TianKun, Wang
• Format: Conference or Workshop Item
• Language: English
• Published: 2020
• Subjects: QC1-999 Physics
• Online Access: http://eprints.usm.my/49087/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2070.pdf; http://eprints.usm.my/49087/
• Institution: Universiti Sains Malaysia

In this paper, gallium oxide (Ga2O3) thin films were grown on silicon (Si) substrate using a relatively simple and low-cost sol-gel spin coating method followed dry oxidation process. Two series of dry oxidation experiments were conducted, i.e., (i) annealing at different oxygen flow rates (i.e.,...