The Development Of 8-Inch Roll-To-Plate Nanoimprint Lithography(8-R2p-Nil) System With Uv-Led Exposure

• Main Author: Lee, Lai Seng
• Format: Thesis
• Language: English
• Published: 2019
• Subjects: T Technology; TJ Mechanical engineering and machinery
• Online Access: http://eprints.usm.my/51482/1/The%20Development%20Of%208-Inch%20Roll-To-Plate%20Nanoimprint%20Lithography%288-R2p-Nil%29%20System%20With%20Uv-Led%20Exposure.pdf; http://eprints.usm.my/51482/
• Institution: Universiti Sains Malaysia

Lithography, a significant tool in microchip manufacturing experiences major changes in lens material and design due to reduction of radiation wavelength used in conventional lithography tool. This is caused by shrinkage of microchip size in accordance to Moore's law over the years. This paves...